Photoluminescence spectral imaging measurement system

PMEye-3000 Photoluminescence spectral imaging measurement system

Photoluminescence spectral imaging measurement system
PMEye-3000(PL-Mapping) is applicable for LED epitaxial wafers, semiconductor wafer, solar cell etc., quality-control and research and testing of products. This system will finish two-dimensional scanning imaging Mapping for PL Spectral of Sample. 3D display result make more easier for analysis and comparable. The software is very simple for new user to control.

Measurement Principle
PL is a radiative recombination effect.. Under the excitation of a certain wavelength light source, electrons absorp excitation photon energy,move to higher energy level and in a excited state.

Application of PL
LED wafers, solar cell , semiconductor wafers, semiconductor thin film materials’s test and research.

Characteristic
PL Mapping Measurement
Kinds of laser(option)
The scanning speed of Mapping: 180points/sec
Spatial resolution:50um
Spetral resolution: 0.1 nm@1200 g/mm
The mapping result is displayed by 3D
Max Sample Size: 8 inches
Accurate position of sample
Vacuum adsorption of sample
Low temperature measurement is optionally
Film thickness measurement

Compact design
PMEye3000 PL Mapping is a compact design system,the key size is designed according to Ergonomic design theory; The height of sample and PC are very suitable for people to operate; Very convenient to install in Lab and Workshop. Retractable platform,LCD and Keyboard are very convenient to fix at the side of this system; Wheels at the bottom of PL make easy to remove system ;

Modular Design
PMEye-3000 PL Mapping adopt machine design;It is very easy for customer to put sample and donot need to adjust other things,PC control software.

Two measurements and extensive application

DC&AC mode;DC is applicable for regular inspection and AC is for weak fluorescence inspection.
Monitor excitation light,Calibration measurement.

Most PL sytsems only test wavelength and intensity of fluorescence, not monitor excitation light;Instability of excitation light will effect on PL measurement . PMEye-3000 PL Mapping have the function of monitor excitation light and cabilbrate measurement. This will eliminate measurement error caused by excitation light source.

Laser option flexible
PMEye-3000 PL Mapping has so many kinds of high stability lasers; Systems can own two built-in lasers and one external laser. The standard laser is 405nm high stability laser,User can choose different lasers according to different applications.

Optional Lasers : 405nm,442nm,532nm, 785nm, 808nm

External laser: 325nm

Automatical Mapping function
PMEye-3000 PL Mapping includes 200x200mm XY motorized stage. The max sample size is 8 inches. User can set scan area,scan step length,scan speed and so on; The sann speed is up to 180 points each second,spatial resolution is 50um. Differentcolors stands for different intensity.
Software function

Strong software function and easy operation
MEye-3000 supply single-point PL spectral measurement and display: X-Y Mapping measurrment of singal wavelength. User can set all the date and calculate freely.

Low temperature sample chamber accessories

It can finish fluorescence detection in low temperature for sample. Some samples has different fluorescence at different temperature and so user need to control it by low temperature.

PMEye-3000 Specification
Excitation light: 405nm low noise semiconductor laser.power:100mW
Spectral Resolution: Si detector,200-1100nm
Data Acquisition System:DCS300PA(DC);SR830 lock-in amplifier(AC,option)
XY sample stage:travel 200mm, repeatability«3um
Sample size:6pcs wafer,vacuum absorption;
Scan speed:10,800 points/s
Scan step length:min is 1.25um
Spatail resolution<50um
Scan mode: single-point spectral scanning,singal-wavelength mapping,peak wavelength mapping,lean intensity mapping and so on.

4. Photoluminescence spectral imaging measurement system