Ellipsometer REX1 is ellipsometer for education purpose, which is based on the nulling ellipsometry sampling principle. It is a manually operated instrument for the measurement of nano-film on substrate in educational field.
Ellipsometer REX1 is designed for the demonstration of thickness and refractive index measurement of nano-film. It can be also used to measure the refractive index n and extinction coefficient k of bulk material (e.g. metal, semiconductor, dielectrics).
Ellipsometer REX2 is ellipsometer for education purpose, which is based on the nulling ellipsometry sampling principle. It is an automatically operated instrument for the measurement of nano-film on substrate in educational field.
Ellipsometer REX2 is designed for the demonstration of thickness and refractive index measurement of nano-film. It can be also used to measure the refractive index n and extinction coefficient k of bulk material (e.g. metal, semiconductor, dielectrics).
Ellipsometer is a non-contact, non-destructive and high sensitive optical approach for characterization the structural and physical properties of thin film in the order of nanometer scale, which based on the light polarization change before and after reflection upon the sample surface and interface. REMPro is a multiple angle laser ellipsometer, which is applied for measurement the film parameters on the smooth substrate. It provides the film thickness and optical constants at the He-Ne laser wavelength 632.8 nm with an extraordinary precision and accuracy. The REMPro can be utilized to characterize single films, multiple layer stacks (1~3 layer) and bulk materials (substrates). Due to its modern, easy to use, recipe oriented and robust software, the REMPro fits the requirements of R&D as well as of quality control in production environments.
It covers a large variety of applications like microelectronics, semiconductors, biology and life science, display technology and much more. High sensitivity over theentire ψ,Δ plane and ultra-low noise detection allow for measuring even non-ideal, stray light causing, rough surfaces as e.g. solar cells. The REMPro is designed to tap the full potential of the method ellipsometry and to push the limits. The core concept of the REMPro with highly phase stabilized compensator, computer controlled frequency stabilized rotating compensator and two-zone averaging method allows for the measurement of ultra thin films and surface roughness on almost any kind of absorbing or transparent substrate with a flat, mirror - like surface. The REMPro comprises a manual goniometer with superior performance and angle accuracy to perform fast variable angle measurements for more complex samples. The REMPro is a compact instrument, quickly up and running, it is controlled by state of the art PC.
Multiple Angle Laser Ellipsometer for Photovoltaic Industry
Ellipsometer is a non-contact, non-destructive and high sensitive optical approach for characterization the structure and physical properties of thin film in the order of nanometer scale, which based on the light polarization change before and after reflection upon the sample surface and interface. REMPro-PV ellipsometer is new generation production for photovolaitic solar cell field application, which is applied for measurement the antireflection layer parameters on the smooth or textured solar cell. It provides the film thickness and optical constants at the He-Ne laser wavelength 632.8 nm with an extraordinary precision and accuracy. The REMPro-PV can be utilized to characterize single films, multiple layer stacks and bulk materials (substrates).
Due to its modern, easy to use, recipe oriented and robust software the REMPro-PV fits the requirements of R&D as well as of quality control in production environments. It covers a large variety of applications like microelectronics, semiconductors, biology and life science, display technology and much more. High sensitivity over the entire ψ,Δ plane and ultra-low noise detection allow for measuring even non-ideal, stray light causing, rough surfaces as e.g. solar cells.
The REMPro-PV is designed to tap the full potential of the method ellipsometry and to push the limits. The core concept of the REMPro-PV with highly phase stabilized compensator, computer controlled frequency stabilized rotating compensator and two-zone averaging allows for the measurement of ultra thin films and surface roughness on almost any kind of absorbing or transparent substrate with a flat, mirror - like surface.
The REMPro-PV comprises a manual goniometer with superior performance and angle accuracy to perform fast variable angle measurements for more complex samples. The REMPro-PV is a compact instrument, quickly up and running controlled by any state of the art PC.
