Model No: ASR500 Spectroscopic Reflectometer & Film Thickness Measurement System
Features:
· Easy to set up
· Easy to operate with Window based software
· Advanced optics design for best system performance
· Array based detector system to ensure fast measurement
· Measure film thickness and Refractive Index up to 5 layers
· Allow to acquire reflection, transmission and absorption spectra in milliseconds
· Capable to be used for real time or in-line thickness, refractive index monitoring
· System comes with comprehensive optical constants database and library
· Advanced Software allows user to use either NK table, dispersion or effective media approximation (EMA) for each individual film.
· Upgradeable to AMSP (Microspectrophotometer) system, ASRM Mapping system, Multiple channel system, Large Spot for · direct measurement over patterned or featured structure
· Apply to many different type of substrates with different thickness
· Various accessories available for special configurations such as running measurement over the curve surface
· 2D and 3D output graphics and user friendly data management interface
System Configuration:
· Model: SR500R
· Dual Detectors: CCD Array for UV-Vis and InGaAs Detector Array for Near-Infrared (NIR)
· Light Source: Combined Deuterium and Halogen
· Light Delivery: Fiber Optics
· Stage: Black Anodized Aluminum Alloy with Easy Adjustment for sample height, 200x200mm size
· Software:
· Communication: USB
· Measurement Type: Film thickness, reflection spectrum, refractive index
· Computer needed: P3 above with minimum 50 MB space
· Power: 110– 240 VAC /50-60Hz, 1.5 A
· Warranty: One year labor and parts
Specifications:
· Wavelength range: 250 to 1700 nm
· Spot Size: 500 µm to 5mm
· Sample Size: 200x200mm or 200 mm in diameter
· Substrate Size: up to 50mm thick
· Measurable thickness range*: 2 nm to 150 µm
· Measurement Time: 2 ms minimum
· Accuracy*: better than 0.5% (comparing with ellipsometry results for Thermal Oxide sample by using the same optical constants)
· Repeatability*: < 1 ? (1 sigma from 50 thickness readings for 1500 ? Thermal SiO2 on Si Wafer)
Options:
· Transmission Fixture for Transmission and Absorption Measurement (ASR500RT)
· Micro spot for measuring small area down to 5 µm size (AMSP500)
· Multiple Channel for simultaneously measurement at multiple locations (ASR500xX)
· Mapping uniformity over 200 or 300 mm wafer (ASRM500-200 /300)
